Policide (engineering)

This article is about a chemical engineering term. For a political science term, see Policide. For other uses, see Policide (disambiguation).

Policide (also spelled polyside) in engineering refers to a combination of a silicide and polysilicon.

In chemical engineering, "policide" or "polyside" is used to describe a combination of polysilicon and a silicide.[1]

References

  1. ↑ Yckache, K; P. Boivina; F. Baigeta; C. Kristukatb; G. Aurielb; B. Sagnesb; J. Oualidb; A. Glachant (April 1999). "Influence of polycide deposition on the reliability of wet and nitrided oxides". Journal of Non-Crystalline Solids. 245 (1–3): 97–103. doi:10.1016/S0022-3093(98)00854-0., abstract viewed 10-24-2006


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